A white-light scanning interferometer (WSI) is a measuring method to chart the degrees of roughness, height and warping of an object. It is the most accurate device for measuring of MEMS, semiconductor, solar cell, LED and more.
The white-light scanning interferometer possesses the high resolution and accuracy. With the measuring of methods of white-light scanning interferometer (WSI), the Hawk3DTM 3D Surface profiler is a very strong optical interferometric profiler for profiling images.
We successfully measure nano-scale gap thickness by a special configuration of white-light scanning interferometer, in which the measured gap acts as a modulator of the light source.
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